Measurement of mechanical properties of TiOx a TiZrOx thin films
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989592%3A15310%2F22%3A73616040" target="_blank" >RIV/61989592:15310/22:73616040 - isvavai.cz</a>
Result on the web
<a href="https://obd.upol.cz/id_publ/333195927" target="_blank" >https://obd.upol.cz/id_publ/333195927</a>
DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Measurement of mechanical properties of TiOx a TiZrOx thin films
Original language description
The report deals with local mechanical testing of TiOx and TiZrOx thin films on a glass substrate. The indentation hardness and reduced modulus were measured using instrumented indentation test. The adhesion-cohesion properties were studied by scratch test, and the dynamic resistance of these films was analyzed by impulse test. The effect of the indenter radius on the deformation response of the thin films was also explored.
Czech name
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Czech description
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Classification
Type
V<sub>souhrn</sub> - Summary research report
CEP classification
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OECD FORD branch
20501 - Materials engineering
Result continuities
Project
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Continuities
N - Vyzkumna aktivita podporovana z neverejnych zdroju
Others
Publication year
2022
Confidentiality
C - Předmět řešení projektu podléhá obchodnímu tajemství (§ 504 Občanského zákoníku), ale název projektu, cíle projektu a u ukončeného nebo zastaveného projektu zhodnocení výsledku řešení projektu (údaje P03, P04, P15, P19, P29, PN8) dodané do CEP, jsou upraveny tak, aby byly zveřejnitelné.
Data specific for result type
Number of pages
56
Place of publication
neuveden
Publisher/client name
SISECAM, Science and Technology Center, Cumhuriyet Mah. Sisecam Yolu, 41400 Gebze-Kocaeli, Turkey
Version
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