Method and system for plasma diagnostics

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989592%3A15310%2F25%3A73634591" target="_blank" >RIV/61989592:15310/25:73634591 - isvavai.cz</a>

Alternative codes found

RIV/68378271:_____/25:00619663

Result on the web

<a href="https://worldwide.espacenet.com/publicationDetails/originalDocument?FT=D&date=20250219&DB=&locale=en_EP&CC=EP&NR=4416753B1&KC=B1&ND=4" target="_blank" >https://worldwide.espacenet.com/publicationDetails/originalDocument?FT=D&date=20250219&DB=&locale=en_EP&CC=EP&NR=4416753B1&KC=B1&ND=4</a>

DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Method and system for plasma diagnostics

Original language description

The above-mentioned disadvantages of the prior art are at least partially solved by a method of plasma diagnostics, according to claim 1, in which an alternating voltage of frequency f in the range of values of 0.01‑100 MHz is applied to a reference electrode. The reference electrode has a measurable and well-defned areaAAP, it is located in a discharge chamber and in contact with the plasma excited in the discharge chamber.Afrst set of waveforms of electric current and voltage on the reference electrode corresponding to the current and voltage values measured on the electrode over a certain time interval is created, e.g., to obtain the time and volt-ampere characteristics of the reference probe. After the creation of the frst set of values, the supply of voltage to the reference electrode is terminated.Subsequently, a second set of values is created, which is created from the frst set of values by subtracting the parasitic current and voltage values, thereby obtaining the time and volt-ampere characteristics of the reference electrode without the infuence of parasitic values. From the second set of values, the value of the diferential conductivity YAP and the diferential capacity of the reference electrode in the region of the foating potential of the plasma is determined, or for values close to the value of the foating potential of the plasma with error 20%, e.g., by calculation of the tangent of dependence, direct calculation or direct measurement. In the next step, an alternating voltage of the same frequency is applied to the main electrode. The main electrode is also located in the discharge chamber and is in contact with the plasma. It is preferably designed as a planar electrode, e.g., rectangular or square. It is heterogeneously covered by a dielectric of an unknown dielectric constant, so it is not possible to accurately determine its surface and roughness by conventional measurement method. The roughness varies in diferent places, the thickness of the dielectric and its composition is not homogeneous. By measurement of RF voltage and current on the main electrode, a third set of waveforms of electric current and voltage on the main electrode over a certain time interval is created, e.g., in order to obtain time and volt-ampere characteristics of the main electrode. Afterthe creation of the third set of values, the supply of voltage to the main electrode is terminated.Subsequently, a fourth set of values is created, which is formed from the third set of values by subtracting the parasitic values of current and voltage waveforms, thus obtaining the time and volt-ampere characteristics of the main electrode without the infuence of undesired values.

Czech name

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Czech description

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Type

P - Patent

CEP classification

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OECD FORD branch

10305 - Fluids and plasma physics (including surface physics)

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2025

Confidentiality

C - Předmět řešení projektu podléhá obchodnímu tajemství (§ 504 Občanského zákoníku), ale název projektu, cíle projektu a u ukončeného nebo zastaveného projektu zhodnocení výsledku řešení projektu (údaje P03, P04, P15, P19, P29, PN8) dodané do CEP, jsou upraveny tak, aby byly zveřejnitelné.

Patent/design ID

EP4416753B1

Publisher

EPO_1 -

Publisher name

European Patent Office

Place of publication

Munich, The Hague, Berlin, Vienna, Brussels

Publication country

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Date of acceptance

Feb 19, 2025

Owner name

Univerzita Palackého v Olomouci, Fyzikální ústav AV ČR v.v.i.

Method of use

A - Výsledek využívá pouze poskytovatel

Usage type

A - K využití výsledku jiným subjektem je vždy nutné nabytí licence