Decision Tree-Supported Analysis of Gallium Arsenide Growth Using the LEC Method
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F67985807%3A_____%2F23%3A00579923" target="_blank" >RIV/67985807:_____/23:00579923 - isvavai.cz</a>
Result on the web
<a href="https://doi.org/10.3390/cryst13121659" target="_blank" >https://doi.org/10.3390/cryst13121659</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.3390/cryst13121659" target="_blank" >10.3390/cryst13121659</a>
Alternative languages
Result language
angličtina
Original language name
Decision Tree-Supported Analysis of Gallium Arsenide Growth Using the LEC Method
Original language description
In this study, an axisymmetric Czochralski furnace model for the LEC growth of gallium arsenide is presented. We produced 88 datasets through computational fluid dynamics simulations. Among the many parameters that affect crystal growth, a total of 13 input parameters were selected, including the geometry and material parameters of the hot zone (crucible, heaters, radiation shield, and crystal), as well as the process parameters (such as pulling and rotation rates, heating power, etc.). Voronkov criteria (v/Gn), interface deflection, and the average interface temperature gradient were selected as the output parameters. We carried out a correlation analysis between the variables and used decision trees to study the impact of the 13 input variables on the output variables. The results indicated that in the growth of gallium arsenide, the main factor affecting interface deflection and the average interface thermal gradients is the crucible rotation rate. For v/Gn, it is the pulling rate.
Czech name
—
Czech description
—
Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
—
OECD FORD branch
10201 - Computer sciences, information science, bioinformathics (hardware development to be 2.2, social aspect to be 5.8)
Result continuities
Project
—
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2023
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Crystals
ISSN
2073-4352
e-ISSN
2073-4352
Volume of the periodical
13
Issue of the periodical within the volume
12
Country of publishing house
CH - SWITZERLAND
Number of pages
16
Pages from-to
1659
UT code for WoS article
001130951800001
EID of the result in the Scopus database
2-s2.0-85180658215