Determination of Composition and Thickness of MnSi and MnGe Layers by EDS.

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F67985858%3A_____%2F20%3A00541357" target="_blank" >RIV/67985858:_____/20:00541357 - isvavai.cz</a>
Result on the web
<a href="http://hdl.handle.net/11104/0318917" target="_blank" >http://hdl.handle.net/11104/0318917</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1007/s10921-020-00685-2" target="_blank" >10.1007/s10921-020-00685-2</a>

Result language
angličtina
Original language name
Determination of Composition and Thickness of MnSi and MnGe Layers by EDS.
Original language description
Determination of composition and thickness is crucial for the preparation of thin layers. A separate measurement is possible, however, it could be time-consuming, and each technique requires a specifically prepared sample. Therefore, a combined, fast, and reliable technique would be advantageous. Calibration of energy dispersive X-ray spectroscopy (EDS) integrated with scanning electron microscope (SEM) by X-ray photoelectron spectroscopy (XPS), weighting balance and atomic force microscopy (AFM) were performed for simultaneous and non-destructive concentration, area density and thickness measurements of MnSi and MnGe thin layers prepared by a reactive pulsed laser deposition (PLD). The linearity of calibrations was supported by Monte Carlo calculations. The calibrations enabled the evaluation of Mn concentration with a deviation better than 2.7 at.%. The area density was determined with a deviation better than 6.8 µg/cm2, and the thickness was determined with a deviation better than 4.1 nm for samples measured with a standard substrate. The thickness measurement calibration omitting the standard substrate measurement resulted in the higher deviation of 7.6 nm, however, it enabled double sample throughput and spatial analyses.n n n
Czech name
—
Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
—
OECD FORD branch
10403 - Physical chemistry

Project
<a href="/en/project/GA18-15613S" target="_blank" >GA18-15613S: Integrating plasmonic metal nanoparticles with photonic TiO2 nanosheets for synergistically water splitting and environmental photocatalysis</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2020
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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