Synthesis of High Purity Si3N4 and SiC Powders by CVD Method.

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081715%3A_____%2F03%3A25033047" target="_blank" >RIV/68081715:_____/03:25033047 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Synthesis of High Purity Si3N4 and SiC Powders by CVD Method.

Original language description

Fine, sub-micrometer, amorphous powders of SiC and Si3N4 have been prepared from SiH4 - NH3 and C2H2 - SiH4 gaseous systems respectively, in a tubular flow reactor. The particle size of powders prepared at 1373 K is in the range of 50 - 150 nm and 10 to100 nm for Si3N4 and SiC, respectively. The content of metal impurities (Al, Cr, Cu and Fe) in the presented powders is one order of magnitude lower compared to the commercially available powders prepared by other methods.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

CB - Analytical chemistry, separation

OECD FORD branch

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Project

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Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2003

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Ceramics - Silikáty

ISSN

0862-5468

e-ISSN

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Volume of the periodical

47

Issue of the periodical within the volume

3

Country of publishing house

SK - SLOVAKIA

Number of pages

6

Pages from-to

88-93

UT code for WoS article

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EID of the result in the Scopus database

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