Estimation of mechanical parameters of thin films using finite element analysis

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081723%3A_____%2F18%3A00494051" target="_blank" >RIV/68081723:_____/18:00494051 - isvavai.cz</a>

Alternative codes found

RIV/68081731:_____/18:00494051

Result on the web

<a href="http://dx.doi.org/10.31224/osf.io/3adt5" target="_blank" >http://dx.doi.org/10.31224/osf.io/3adt5</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.31224/osf.io/3adt5" target="_blank" >10.31224/osf.io/3adt5</a>

Result language

angličtina

Original language name

Estimation of mechanical parameters of thin films using finite element analysis

Original language description

This study shows a methodology to estimate mechanical parameters of thin films by means of a bulgentest and a numerical approach. The methodology is based on the combination of finite element analysis with anclassical analytical method. Finite element modelling was conducted for monolayer (Si3N4) membranes of 2x2mmnwith the aim to approximate both the load-deflection curves experimentally measured and the classical loaddeflectionnanalytical model. Error functions were constructed and minimized to delimit a coupled solution spacenbetween Young’s modulus and Poison’s ratio. In a traditional bulge test analysis only one of the elastic propertiesncan be determined due to that there is not unique solution in the estimations of these parameters. However, bothnelastic parameters were determined through the proposed numerical procedure which compares the deformednsurfaces for a specific set of optimal elastic parameters computed. Results shows that the estimated elasticnproperties agree with corresponding values determined by other methods in the literature

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

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OECD FORD branch

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Project

<a href="/en/project/EF16_013%2F0001823" target="_blank" >EF16_013/0001823: Modernization of Infrastructure for the Study and Application of Advanced Materials (m-IPMinfra)</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2018

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

Applied Mechanics 2018

ISBN

978-80-261-0766-8

ISSN

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e-ISSN

—

Number of pages

6

Pages from-to

157-162

Publisher name

Západočská univerzita v Plzni

Place of publication

Plzeň

Event location

Myslovice

Event date

Apr 9, 2018

Type of event by nationality

WRD - Celosvětová akce

UT code for WoS article

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