Two Axis Micropositioning System with Piezoelectric Actuators and Digital Control.
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F01%3A12010035" target="_blank" >RIV/68081731:_____/01:12010035 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Two Axis Micropositioning System with Piezoelectric Actuators and Digital Control.
Original language description
The scanning table, which is controlled by a PZT control system that has been constructed, is presented. It is used for a fine manipulation of a probe in measurement of the profile of the laser beam focused by high N. A. lens e.g.. The whole system has been calibrated by a two-axis laser interferometer. Where the PZT control system and the interferometer were connected to the CAN network and the actual X-Y position was saved to the PC synchronously with the CAN network time stamps generated by the PZT control system. Precision about 300nm at the positioning system was reached.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2001
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of the 12th Czech-Slovak-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics (Proc. SPIE 4356).
ISBN
0-8194-4047-7
ISSN
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e-ISSN
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Number of pages
6
Pages from-to
333-338
Publisher name
SPIE-The International Society for Optical Engineering
Place of publication
Washington
Event location
Velké Losiny [CZ]
Event date
Sep 12, 2000
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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