Fully electrostatic low energy scanning electron column.
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F02%3A12020054" target="_blank" >RIV/68081731:_____/02:12020054 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Fully electrostatic low energy scanning electron column.
Original language description
The exploitation of low-energy electrons for examination of the material surfaces has several advantages. One of them is a small depth penetration of the primary electrons (PE) to the observed material. At low energies the charging effects on non-conductive or slightly conductive specimens are suppressed and also radiation damage of the observed specimen is decreased. Since the secondary electron (SE) yield is high, the signal to noise ratio (SNR) is about one order of magnitude larger than those in microscopes operated at 20kV.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2002
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of the 8.sup.th./sup. international seminar, held in Skalský dvůr.
ISBN
80-238-8986-9
ISSN
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e-ISSN
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Number of pages
2
Pages from-to
33-34
Publisher name
Ústav přístrojové techniky Akademie věd České republiky
Place of publication
Brno
Event location
Skalský dvůr [CZ]
Event date
Jul 8, 2002
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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