Charge-coupled device area detector for low energy electrons.

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F03%3A12030042" target="_blank" >RIV/68081731:_____/03:12030042 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Charge-coupled device area detector for low energy electrons.
Original language description
A fast position-sensitive detector was designed for the angle- and energy-selective detection of signal electrons in the very low energy scanning electron microscope (VLESEM) with signal electron energy up to 5 keV [1]. The detector is based on the backilluminated high performance CCD sensor CCD39-02 made by Marconi (80x80 pixels - 1920x1920 .mu.m, pixel size 24x24 .mu.m) working in the directly electron-bombardment mode - EBCCD detector. The electronics for control of the CCD sensor and processing thesignal data is based on the digital signal processor ADSP-2181.
Czech name
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Czech description
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Project
<a href="/en/project/GA202%2F03%2F1575" target="_blank" >GA202/03/1575: Acquisition of image in the low energy scanning electron microscope via detection of the angular distribution of signal electrons</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2003
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Proceedings of the 6th Multinational Congress on Microscopy - European Extension.
ISBN
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ISSN
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e-ISSN
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Number of pages
2
Pages from-to
476-477
Publisher name
Croatian Society for Electron Microscopy
Place of publication
Zagreb
Event location
Pula [HR]
Event date
Jun 1, 2003
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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