Comparison of techniques for diffraction grating topography analysis
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F10%3A00350662" target="_blank" >RIV/68081731:_____/10:00350662 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Comparison of techniques for diffraction grating topography analysis
Original language description
There are a wide range of analytical techniques which may be used for surface structure characterization. For high resolution surface investigations, two commonly used techniques are Atomic Force Microscopy (AFM) and Scanning Electron Microscopy (SEM). Both techniques are capable resolve surface structure down to the nanometer in scale. However the mechanism of topography imaging and type of information acquired is different.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2010
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of the 12th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation
ISBN
978-80-254-6842-5
ISSN
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e-ISSN
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Number of pages
4
Pages from-to
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Publisher name
Institute of Scientific Instruments AS CR, v.v.i
Place of publication
Brno
Event location
Skalský dvůr
Event date
May 31, 2010
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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