Semiconductor laser sources at 760 nm wavelength for nanometrology
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F10%3A00352185" target="_blank" >RIV/68081731:_____/10:00352185 - isvavai.cz</a>
Result on the web
—
DOI - Digital Object Identifier
—
Alternative languages
Result language
angličtina
Original language name
Semiconductor laser sources at 760 nm wavelength for nanometrology
Original language description
Measurement with nanometer resolution is required for the next advance in nanotechnology. Especially the noncontacting methods of measurement are very .promising. We present the set-up of the laser interferometer with nanometer resolution. A stabilized laser source with the DFB (Distributed FeedBack) laser diode was developed and its realization was implemented to the laser interferometer. The output of the DFB laser source and the design of optical set-up of the laser interferometer are realized by fiber optics. It will improve repeatability of measuring by reducing the influence of the index of refraction of air. The measurement probe is realized by standard optical fiber with reflection coated optical connector. Due to using of the DFB laser sourceit is possible to measure of the length in incremental or absolute regime. The stability and the tunability of the wavelength of the laser source are crucial parameters to improve resolution and accuracy of the laser interferometer.
Czech name
—
Czech description
—
Classification
Type
D - Article in proceedings
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
—
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2010
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of the 9th WSEAS International Conference on Microelectronics, Nanoelectronics, Optoelectronic
ISBN
978-954-92600-3-8
ISSN
—
e-ISSN
—
Number of pages
6
Pages from-to
—
Publisher name
WSEAS EUROPMENT Press
Place of publication
Sofia
Event location
Catania
Event date
May 29, 2010
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
—