Laser Measuring Gauge for Precise Transducer Calibrations in Nanometric Scale
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F10%3A00352197" target="_blank" >RIV/68081731:_____/10:00352197 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Laser Measuring Gauge for Precise Transducer Calibrations in Nanometric Scale
Original language description
The precise transducers like capacitive, inductive or incremental sensors for distance measurements are used in nanometrology applications very often. They measure 3D position of a cantilever in AFM microscopy stage, they sense thickness of nano-layers or they help us to identify thermal dilatation of nanomaterials. Their main advantages are: lower price than laser interferometers, smaller dimensions and possibility to insert them into very complicated measuring setup. Before installing these sensors for various nanotechnology applications it is necessary to calibrate their scale by high-resolution laser interferometer. Such an interferometer is implemented into special measuring gauge where the investigated sensor is inserted and calibrated. In the work we present new laser measuring system for precise calibrations of length measuring transducers. This gauge is called nano-comparator because the resolution of the positioning of its measuring probe is in order of nanometers.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2010
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of the International Conference on Nanotechnology: Fundamentals and Applications
ISBN
978-0-9867183-0-4
ISSN
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e-ISSN
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Number of pages
5
Pages from-to
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Publisher name
International ASET
Place of publication
Ottawa
Event location
Ottawa
Event date
Aug 4, 2010
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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