Laser interference nano-comparator for length sensor calibration in nanometric scale

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F10%3A00352200" target="_blank" >RIV/68081731:_____/10:00352200 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Laser interference nano-comparator for length sensor calibration in nanometric scale

Original language description

In the work we present new laser measuring system for precise calibrations of length measuring transducers. This gauge is called nano-comparator because the resolution of the positioning of the measuring probe is in order of nanometers. The gauge works fully self-controlled and it is equipped by control software which is able to calibrate wide area of transducers. We put main stress to compensating of thermal dilatation of the gauge body and to eliminating of imperfection of linear guide ways which areused for positioning of the testing probe of the gauge. The work presents the first records of scale calibration of an incremental transducer.

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

BH - Optics, masers and lasers

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2010

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

2nd International Conference NANOCON 2010

ISBN

978-80-87294-19-2

ISSN

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e-ISSN

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Number of pages

4

Pages from-to

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Publisher name

Tanger s.r.o

Place of publication

Ostrava

Event location

Olomouc

Event date

Oct 12, 2010

Type of event by nationality

EUR - Evropská akce

UT code for WoS article

000286656400046