All

What are you looking for?

All
Projects
Results
Organizations

Quick search

  • Projects supported by TA ČR
  • Excellent projects
  • Projects with the highest public support
  • Current projects

Smart search

  • That is how I find a specific +word
  • That is how I leave the -word out of the results
  • “That is how I can find the whole phrase”

Nanometrology coordinate measurement machines uncertainties caused by frequency fluctuations of the laser

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F12%3A00385784" target="_blank" >RIV/68081731:_____/12:00385784 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Nanometrology coordinate measurement machines uncertainties caused by frequency fluctuations of the laser

  • Original language description

    One of considerable sources of displacement measurement uncertainty in nanometrology systems such as multidimensional interferometric positioning for local probe microscopy is the influence of amplitude and especially frequency noise of a laser source which powers the interferometers. We investigated the noise properties of several laser sources suitable for interferometry for micro- and nano-CMMs (coordinate measurement machines) and compared the results with the aim to find the best option. The influences of amplitude and frequency fluctuations were compared together with the noise and uncertainty contributions of other components of the whole measuring system. Frequency noise of investigated laser sources was measured by two approaches ? at first with the help of frequency discriminator (Fabry-Perot resonator) converting the frequency (phase) noise into amplitude one and then directly through the measurement of displacement noise at the output of the interferometer fringe detection

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    BH - Optics, masers and lasers

  • OECD FORD branch

Result continuities

  • Project

    Result was created during the realization of more than one project. More information in the Projects tab.

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Others

  • Publication year

    2012

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    NANOCON 2012, 4th International Conference Proceedings

  • ISBN

    978-80-87294-32-1

  • ISSN

  • e-ISSN

  • Number of pages

    6

  • Pages from-to

    811-816

  • Publisher name

    TANGER Ltd

  • Place of publication

    Ostrava

  • Event location

    Brno

  • Event date

    Oct 23, 2012

  • Type of event by nationality

    WRD - Celosvětová akce

  • UT code for WoS article