Uncertainties of displacement measurement of nanometrology coordinate measurement machines caused by laser source fluctuations

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F12%3A00386112" target="_blank" >RIV/68081731:_____/12:00386112 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1117/12.922439" target="_blank" >http://dx.doi.org/10.1117/12.922439</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1117/12.922439" target="_blank" >10.1117/12.922439</a>

Result language
angličtina
Original language name
Uncertainties of displacement measurement of nanometrology coordinate measurement machines caused by laser source fluctuations
Original language description
One of considerable sources of displacement measurement uncertainty in nanometrology systems such as multidimensional interferometric positioning for local probe microscopy is the influence of amplitude and especially frequency noise of a laser source which powers the interferometers. We investigated the noise properties of several laser sources suitable for interferometry for micro- and nano-CMMs (coordinate measurement machines) and compared the results with the aim to find the best option. The influences of amplitude and frequency fluctuations were compared together with the noise and uncertainty contributions of other components of the whole measuring system. Frequency noise of investigated laser sources was measured by two approaches - at first with the help of frequency discriminator (Fabry-Perot resonator) converting the frequency (phase) noise into amplitude one and then directly through the measurement of displacement noise at the output of the interferometer fringe detection
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Optical Micro- and Nanometrology IV, (Proceedings of SPIE )
ISBN
978-0-8194-9122-0
ISSN
—
e-ISSN
—
Number of pages
9
Pages from-to
"84301D:1"-"9"
Publisher name
SPIE
Place of publication
Bellingham
Event location
Brussels
Event date
Apr 16, 2012
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000305704500043

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