Calculation of difraction aberration using differential algebra

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F12%3A00386398" target="_blank" >RIV/68081731:_____/12:00386398 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Calculation of difraction aberration using differential algebra
Original language description
The resolution in light microscopy is limited mainly by the wave length of light. Although the wave length of the electron is several orders Of magnitude smaller than that of light, the wave properties of the electron limit the resolution of scanning electron microscopes as well. It is described by the diffraction on the limiting aperture. While the effect of the diffraction can be reduced by increasing the limiting aperture size, it affects the resolution by increased geometrical and chromatic aberrations, that are more critical in the electron optics than in the light optics. These opposite trends cause that the best resolution is given by an aperture size that balances the effect of the diffraction with the effect of geometric and chromatic aberrations - an optimal aperture.
Czech name
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Czech description
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Project
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Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Proceedings of the 13th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation
ISBN
978-80-87441-07-7
ISSN
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e-ISSN
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Number of pages
4
Pages from-to
59-62
Publisher name
Institute of Scientific Instruments AS CR, v.v.i
Place of publication
Brno
Event location
Skalský dvůr
Event date
Jun 25, 2012
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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