Education and research at clean room laboratory for silicon device technology at Masaryk University
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F12%3A00386448" target="_blank" >RIV/68081731:_____/12:00386448 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Education and research at clean room laboratory for silicon device technology at Masaryk University
Original language description
Masaryk University is operating a clean room laboratory for silicon device technology since April 2007. The laboratory has been designed in partnership with ON Semiconductor Czech Republic. The University covered the construction costs and the company provided guidance during zhe design and construction of the clean rooms and managed supply, installation and start-up of the technology equipment.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Result continuities
Project
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Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Physic and Nanoscale. (Proceedings of the 10th IUVSTA International Summer School )
ISBN
978-80-260-0619-0
ISSN
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e-ISSN
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Number of pages
1
Pages from-to
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Publisher name
IOP AS CR
Place of publication
Praha
Event location
Devět skal
Event date
May 30, 2012
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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