Nano modification of the W(100)/ZrO electron emitter tip using reactive ion etching
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F12%3A00390980" target="_blank" >RIV/68081731:_____/12:00390980 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Nano modification of the W(100)/ZrO electron emitter tip using reactive ion etching
Original language description
The W(100)/ZrO electron emitter tip is typically prepared from a tungsten single-crystal shaft of a diameter of 125 ?m using electrochemical anodic etching. In order to prepare an emitter for e-beam writer with a shaped beam it is desirable to etch the tip with a radius around 100 nm. Despite the anodic etching is precisely controlled using dedicated software, the desired final form shape of the emitter tip is not achieved in every case. The correcting anodic etching is not possible due to the technology principle of the etching itself. We present in this contribution the procedure that modifies/repairs the tungsten tip shape in a nanoscale region using a reactive ion etching (RIE) in CF4 + O2 gaseous mix in a barrel type reactor at the radio frequencyof 13,56 MHz and the working pressure of 1000 Pa. The change of the geometry after the RIE process is checked using a high resolution scanning electron microscope. The influence of the tip modification of the activated thermal-field W(10
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
NANOCON 2012, 4th International Conference Proceedings
ISBN
978-80-87294-32-1
ISSN
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e-ISSN
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Number of pages
6
Pages from-to
723-728
Publisher name
TANGER Ltd
Place of publication
Ostrava
Event location
Brno
Event date
Oct 23, 2012
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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