Modified knife-edge method for current density distribution measurements in e-beam writers

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F13%3A00397634" target="_blank" >RIV/68081731:_____/13:00397634 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1116/1.4802920" target="_blank" >http://dx.doi.org/10.1116/1.4802920</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1116/1.4802920" target="_blank" >10.1116/1.4802920</a>

Result language
angličtina
Original language name
Modified knife-edge method for current density distribution measurements in e-beam writers
Original language description
In this paper, the authors present a modified knife-edge method for two-dimensional current density mapping in electron-beam writing systems. This method is applicable in rectangular and in variable-shaped e-beam writers with a fixed mutual position of the e-beam and the 1st shutter during exposure. In contrast to other methods, the modified knife-edge method uses only native parts of the e-beam writer, giving it the advantage of easy implementation. The measurement error of our method is analyzed and the trade-off between the result accuracy, the current density resolution and the measurement duration is discussed. The presented method is demonstrated by adjusting an electron emitter in order to select a homogeneous e-beam pattern.
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2013
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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