Measurements of current density distribution in shaped e-beam writers

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F16%3A00454665" target="_blank" >RIV/68081731:_____/16:00454665 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1016/j.mee.2015.09.013" target="_blank" >http://dx.doi.org/10.1016/j.mee.2015.09.013</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.mee.2015.09.013" target="_blank" >10.1016/j.mee.2015.09.013</a>

Result language
angličtina
Original language name
Measurements of current density distribution in shaped e-beam writers
Original language description
In this paper, we present four measurement methods for the two-dimensional mapping of the current density distribution in variable-shaped e-beam writers. All the methods use only the native equipment of the e-beam writer which provides the advantage of relatively easy implementation. The first and second measurement methods are based on the knife-edge technique in which the e-beam is scanned in two directions across a Faraday cup opening and across shaping shutters of the forming system, respectively. In the thirdmethod, a phosphor screen is irradiated by a magnified e-beam spot and the current density distribution is represented by the luminescence image on the screen. The fourth method uses electron sensitive resist which is exposed by the e-beam. The developed resist is observed under a microscope and the current density distribution is judged fromthe resist profile. All the methods are demonstrated in an example, compared, and their spatial resolution and accuracy evaluated.
Czech name
—
Czech description
—

Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
JB - Sensors, detecting elements, measurement and regulation
OECD FORD branch
—

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2016
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Similar results(10)