Large-area gray-scale structures in e-beam writer versus area current homogeneity and deflection uniformity
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F16%3A00460202" target="_blank" >RIV/68081731:_____/16:00460202 - isvavai.cz</a>
Result on the web
<a href="http://www.trends.isibrno.cz/" target="_blank" >http://www.trends.isibrno.cz/</a>
DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Large-area gray-scale structures in e-beam writer versus area current homogeneity and deflection uniformity
Original language description
The high stability and good current homogeneity in the spot of the e-beam writer is crucial to the exposure quality, particularly in the case of large-area structures when gray-scale lithography is used. Even though the deflection field distortion is calibrated regularly and beam focus and beam astigmatism is dynamically corrected over the entire deflection field,nwe can observe disturbances in the exposed relief for both nowadays types of e-beam writers, the shaped e-beam writing system and the Gaussian e-beam writing system. A stable and homogeneous angular current density distribution in the spot is important especially in the case of shaped e-beam lithography systems. A non-homogeneity of the spot over deflection field is seen alongside the field boundaries of both lithography systems.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2016
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of the 15th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation
ISBN
978-80-87441-17-6
ISSN
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e-ISSN
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Number of pages
2
Pages from-to
26-27
Publisher name
Institute of Scientific Instruments CAS
Place of publication
Brno
Event location
Skalský dvůr
Event date
May 29, 2016
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000391254000011