Hiding e-beam exposure fields by deterministic 2D pattering

Result code in IS VaVaI
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Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Hiding e-beam exposure fields by deterministic 2D pattering
Original language description
The high stability and good current homogeneity in the spot of the e-beam writer is crucial tonthe exposure quality, particularly in the case of large-area structures when gray-scalenlithography is used. Even though the deflection field distortion is calibrated regularly andnbeam focus and beam astigmatism is dynamically corrected over the entire deflection field, we can observe disturbances in the exposed relief.nRecently, we presented a method that makes use of e–beam exposure imperfection bynintroducing marginally visible high–frequency diffraction gratings of variable pitch that fill innseparate orthogonal exposure fields. The actually presented approach follows up ournresearch on aperiodic arrangements of optical primitives, especially on the phyllotactic–nlike arrangement of sub–micron relief optical elements. This approach is extended from thendiffraction element arrangement to the higher level of exposure fields arrangements.
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2018
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Proceedings of the 16th International Seminar
ISBN
978-80-87441-23-7
ISSN
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e-ISSN
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Number of pages
2
Pages from-to
36-37
Publisher name
Institute of Scientific Instruments The Czech Academy of Sciences
Place of publication
Brno
Event location
Skalský dvůr
Event date
Jun 4, 2018
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000450591400012

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