Measurement of current density distribution in shaped e-beam writers

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F14%3A00434105" target="_blank" >RIV/68081731:_____/14:00434105 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Measurement of current density distribution in shaped e-beam writers
Original language description
The ZrO W(100) Schottky cathode is used in our e-beam writing system working with a rectangular-shaped electron beam. The homogeneous angular current density distribution is crucial for quality of exposures of the shaped beam lithography systems. Two basic types of the angular emission distribution can be observed in dependence on the microscopic final end form shape of the emitter tip, with bright centre and more common dark centre. The stable operation of the cathode thus stable end form shape requires a delicate balance of parameters inside the gun which however can slightly change during cathode life time. This implies the necessity of analysing and periodical monitoring the current density distribution in e-beam. Four methods enabling this measurement are presented.
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
18th International Microscopy Congres. Proceedings
ISBN
978-80-260-6720-7
ISSN
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e-ISSN
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Number of pages
2
Pages from-to
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Publisher name
Czechoslovak Microscopy Society
Place of publication
Praha
Event location
Praha
Event date
Sep 7, 2014
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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