In-beam tracking refractometry for coordinate interferometric measurement
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F14%3A00434169" target="_blank" >RIV/68081731:_____/14:00434169 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1117/12.2052920" target="_blank" >http://dx.doi.org/10.1117/12.2052920</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1117/12.2052920" target="_blank" >10.1117/12.2052920</a>
Alternative languages
Result language
angličtina
Original language name
In-beam tracking refractometry for coordinate interferometric measurement
Original language description
We propose to extend the principle of compensation of the fluctuations of the refractive index of air through monitoring the optical length within the measuring range of the displacement measuring interferometer. The concept is derived form a tracking refractometry evaluating the refractive index of air in the beam axis coinciding with the positioning interferometer. Application of this approach in multi-axis positioning and measurement mans to compromise the principle of spatial unity of the displacement measuring laser beam and the beam of the tracking refractometer. In this contribution we evaluate the level of uncertainty associated with the spatial shift of these two beams. Consequently the nature of the fluctuations of the refractive index of airin laser interferometry is investigated and discussed with the focus on potential applications in coordinate measuring systems and long-range metrological scanning probe microscopy systems.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Optical Micro- and Nanometrology V. (Proceedings of SPIE 9132)
ISBN
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ISSN
0277-786X
e-ISSN
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Number of pages
7
Pages from-to
"91321K: 1"-"7"
Publisher name
SPIE
Place of publication
Bellingham
Event location
Brussels
Event date
Apr 15, 2014
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000345034500051