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Air flow and length noise in displacement interferometry

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F14%3A00441268" target="_blank" >RIV/68081731:_____/14:00441268 - isvavai.cz</a>

  • Result on the web

    <a href="http://dx.doi.org/10.1117/12.2176179" target="_blank" >http://dx.doi.org/10.1117/12.2176179</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1117/12.2176179" target="_blank" >10.1117/12.2176179</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Air flow and length noise in displacement interferometry

  • Original language description

    We report on an evaluation of the influence that fast changes of the refractive index has on the uncertainty of interferometric displacement measurement. Measurement of position within a limited range is typical for coordinate measuring systems such as nanometrology standards combining scanning probe microscopy (SPM) with precise positioning. For long-range systems the varying refractive index of air contributes the most to the overall uncertainty. We proposed to extend the principle of compensation ofthe fluctuations of the refractive index of air through monitoring the optical length within the measuring range of the displacement measuring interferometer. In this contribution we evaluate the level of uncertainty associated with the nature of the fluctuations of the refractive index of air in laser interferometry. We have observed that its fast variations, seen as length noise, are not linearly proportional to the measuring beam path but play a significant role only over distances lo

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    BH - Optics, masers and lasers

  • OECD FORD branch

Result continuities

  • Project

    Result was created during the realization of more than one project. More information in the Projects tab.

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Others

  • Publication year

    2014

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    Optics and Measurement Conference 2014 (Proceedings of SPIE 9442)

  • ISBN

    9781628415575

  • ISSN

    0277-786X

  • e-ISSN

  • Number of pages

    7

  • Pages from-to

    "94420D: 1"-"7"

  • Publisher name

    SPIE

  • Place of publication

    Bellingham

  • Event location

    Liberec

  • Event date

    Oct 7, 2014

  • Type of event by nationality

    WRD - Celosvětová akce

  • UT code for WoS article