Air flow and length noise in displacement interferometry
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F14%3A00441268" target="_blank" >RIV/68081731:_____/14:00441268 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1117/12.2176179" target="_blank" >http://dx.doi.org/10.1117/12.2176179</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1117/12.2176179" target="_blank" >10.1117/12.2176179</a>
Alternative languages
Result language
angličtina
Original language name
Air flow and length noise in displacement interferometry
Original language description
We report on an evaluation of the influence that fast changes of the refractive index has on the uncertainty of interferometric displacement measurement. Measurement of position within a limited range is typical for coordinate measuring systems such as nanometrology standards combining scanning probe microscopy (SPM) with precise positioning. For long-range systems the varying refractive index of air contributes the most to the overall uncertainty. We proposed to extend the principle of compensation ofthe fluctuations of the refractive index of air through monitoring the optical length within the measuring range of the displacement measuring interferometer. In this contribution we evaluate the level of uncertainty associated with the nature of the fluctuations of the refractive index of air in laser interferometry. We have observed that its fast variations, seen as length noise, are not linearly proportional to the measuring beam path but play a significant role only over distances lo
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Optics and Measurement Conference 2014 (Proceedings of SPIE 9442)
ISBN
9781628415575
ISSN
0277-786X
e-ISSN
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Number of pages
7
Pages from-to
"94420D: 1"-"7"
Publisher name
SPIE
Place of publication
Bellingham
Event location
Liberec
Event date
Oct 7, 2014
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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