Contribution of the Refractive Index Fluctuations to the Length Noise in Displacement Interferometry
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F15%3A00449486" target="_blank" >RIV/68081731:_____/15:00449486 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1515/msr-2015-0036" target="_blank" >http://dx.doi.org/10.1515/msr-2015-0036</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1515/msr-2015-0036" target="_blank" >10.1515/msr-2015-0036</a>
Alternative languages
Result language
angličtina
Original language name
Contribution of the Refractive Index Fluctuations to the Length Noise in Displacement Interferometry
Original language description
We report on investigations of how fast changes of the refractive index influence the uncertainty of interferometric displacement measurements. Measurement of position within a limited range is typical for precise positioning of coordinate measuring systems, such as nanometrology standards combined with scanning probe microscopy (SPM). The varying refractive index of air contributes significantly to the overall uncertainty; it plays a role especially in case of longer-range systems. In our experiments we have observed that its fast variations, seen as length noise, are not linearly proportional to the measuring beam path and play a significant role only over distances longer than 50 mm. Thus, we found that over longer distances the length noise rises proportionally. The measurements were performed under conditions typical for metrology SPM systems.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Measurement Science Review
ISSN
1335-8871
e-ISSN
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Volume of the periodical
15
Issue of the periodical within the volume
5
Country of publishing house
SK - SLOVAKIA
Number of pages
5
Pages from-to
263-267
UT code for WoS article
000368270800006
EID of the result in the Scopus database
2-s2.0-84946753292