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Contribution of the Refractive Index Fluctuations to the Length Noise in Displacement Interferometry

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F15%3A00449486" target="_blank" >RIV/68081731:_____/15:00449486 - isvavai.cz</a>

  • Result on the web

    <a href="http://dx.doi.org/10.1515/msr-2015-0036" target="_blank" >http://dx.doi.org/10.1515/msr-2015-0036</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1515/msr-2015-0036" target="_blank" >10.1515/msr-2015-0036</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Contribution of the Refractive Index Fluctuations to the Length Noise in Displacement Interferometry

  • Original language description

    We report on investigations of how fast changes of the refractive index influence the uncertainty of interferometric displacement measurements. Measurement of position within a limited range is typical for precise positioning of coordinate measuring systems, such as nanometrology standards combined with scanning probe microscopy (SPM). The varying refractive index of air contributes significantly to the overall uncertainty; it plays a role especially in case of longer-range systems. In our experiments we have observed that its fast variations, seen as length noise, are not linearly proportional to the measuring beam path and play a significant role only over distances longer than 50 mm. Thus, we found that over longer distances the length noise rises proportionally. The measurements were performed under conditions typical for metrology SPM systems.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

  • CEP classification

    BH - Optics, masers and lasers

  • OECD FORD branch

Result continuities

  • Project

    Result was created during the realization of more than one project. More information in the Projects tab.

  • Continuities

    I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Others

  • Publication year

    2015

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Measurement Science Review

  • ISSN

    1335-8871

  • e-ISSN

  • Volume of the periodical

    15

  • Issue of the periodical within the volume

    5

  • Country of publishing house

    SK - SLOVAKIA

  • Number of pages

    5

  • Pages from-to

    263-267

  • UT code for WoS article

    000368270800006

  • EID of the result in the Scopus database

    2-s2.0-84946753292