E-beam Nano-patterning for Electroforming Replication

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F14%3A00437841" target="_blank" >RIV/68081731:_____/14:00437841 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
E-beam Nano-patterning for Electroforming Replication
Original language description
This contribution deals with nano-patterning by the way of electron beam lithography with satisfying requirements for electroforming replication of desired patterns. Electron beam lithography can be used for creating nano graphics (images, text etc.) dueto its very high resolution and precision. However, patterns created by electron beam lithography cannot be applied for mass production directly because of resist material soft nature (usually a polymer material). Because of that, hard printing plate must be produced. Nickel plate prepared by electroforming is one of the ways to accomplish that. Prior to the production of nickel plate by electroforming, the surface of polymer material has to be covered by a sufficiently thick layer of metal. This procedure can lead to a partial destruction of the motif (completely covered by metal) thus the decreasing of nano graphics resolution. In this paper several nano graphics (images and text with various resolutions) are prepared in positive res
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
NANOCON 2014. 6th International conference proceedings
ISBN
978-80-87294-55-0
ISSN
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e-ISSN
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Number of pages
6
Pages from-to
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Publisher name
TANGER
Place of publication
Ostrava
Event location
Brno
Event date
Nov 5, 2014
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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