Functional nano-structuring of thin silicon nitride membranes
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F20%3A00525191" target="_blank" >RIV/68081731:_____/20:00525191 - isvavai.cz</a>
Result on the web
<a href="https://content.sciendo.com/view/journals/jee/71/2/article-p127.xml" target="_blank" >https://content.sciendo.com/view/journals/jee/71/2/article-p127.xml</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.2478/jee-2020-0019" target="_blank" >10.2478/jee-2020-0019</a>
Alternative languages
Result language
angličtina
Original language name
Functional nano-structuring of thin silicon nitride membranes
Original language description
The paper describes the development and production of a nano-optical device consisting of a nano-perforated layer of silicon nitride stretched in a single-crystal silicon frame using electron beam lithography (EBL) and reactive ion etching (RIE) techniques. Procedures for transferring nanostructures to the nitride layer are described, starting with the preparation of a metallic mask layer by physical vapor deposition (PVD), high-resolution pattern recording technique using EBL and the transfer of the motif into the functional layer using the RIE technique. Theoretical aspects are summarized including technological issues, achieved results and application potential of patterned silicon nitride membranes.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
21002 - Nano-processes (applications on nano-scale); (biomaterials to be 2.9)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2020
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Journal of Electrical Engineering - Elektrotechnický časopis
ISSN
1335-3632
e-ISSN
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Volume of the periodical
71
Issue of the periodical within the volume
2
Country of publishing house
SK - SLOVAKIA
Number of pages
4
Pages from-to
127-130
UT code for WoS article
000536287900009
EID of the result in the Scopus database
2-s2.0-85085758550