Advanced interferometry systems for dimensional measurement in nanometrology

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F14%3A00441274" target="_blank" >RIV/68081731:_____/14:00441274 - isvavai.cz</a>

Result on the web

<a href="http://dx.doi.org/10.1117/12.2086613" target="_blank" >http://dx.doi.org/10.1117/12.2086613</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1117/12.2086613" target="_blank" >10.1117/12.2086613</a>

Result language

angličtina

Original language name

Advanced interferometry systems for dimensional measurement in nanometrology

Original language description

We report on the results of the common collaborative project of applied research where the Institute of Scfientific Instruments (ISI) of the Academy of Sciences of the Czech Republic and a company Meopta ? optika joined their effort in development of high-precision interferometric systems for dimensional metrology and nanometrology. This research exploits previous results in the field of laser standards of optical frequencies and the methodology of interferometric metrology of length together with detection systems of interference signals and their processing at the ISI and the production technology of precise optical components at Meopta ? optika. The main aim of the project is a design of a complex interferometric measuring system in a form of a prototype serving as a master for further production. It concept is a modular family of components configurable for various arrangements primarily for multi-axis measurements in nanotechnology and surface inspection. Within this project we de

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

BH - Optics, masers and lasers

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2014

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

Optics and Measurement Conference 2014 (Proceedings of SPIE 9442)

ISBN

9781628415575

ISSN

0277-786X

e-ISSN

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Number of pages

6

Pages from-to

"94420P: 1"-"6"

Publisher name

SPIE

Place of publication

Bellingham

Event location

Liberec

Event date

Oct 7, 2014

Type of event by nationality

WRD - Celosvětová akce

UT code for WoS article

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