Optimal X-ray detection for thin samples in low-energy STEM

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F16%3A00460207" target="_blank" >RIV/68081731:_____/16:00460207 - isvavai.cz</a>
Result on the web
<a href="http://www.trends.isibrno.cz/" target="_blank" >http://www.trends.isibrno.cz/</a>
DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Optimal X-ray detection for thin samples in low-energy STEM
Original language description
In many applications it is desirable to perform energy-dispersive X-ray spectroscopy (EDS) on very thin samples at low primary beam energies in a STEM. Thin samples, or lamellae, with the thickness of about 10 nm, are mostly prepared in focused ion beam instruments (FIBs), and they are used to evaluate experiments in the development of thin films and coatings, in the semiconductor industry, and in other applications. EDS then provides a map of different chemical elements or compounds in the sample, obtained by scanning the electron beam in a raster. Often the qualitative composition is known as a limited set of materials and only their distribution on the sample is to be determined. For large batches of samples fast measurements are desired to maximize utilization of expensive equipment. In this study we found a method to minimize the time needed to reliably acquire an elemental map by determining the optimal detector placement and the minimal necessary primary electron dose per pixel.
Czech name
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Czech description
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Project
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Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2016
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Proceedings of the 15th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation
ISBN
978-80-87441-17-6
ISSN
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e-ISSN
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Number of pages
2
Pages from-to
44-45
Publisher name
Institute of Scientific Instruments CAS
Place of publication
Brno
Event location
Skalský dvůr
Event date
May 29, 2016
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000391254000020

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