The information depth of backscattered electron imaging
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F16%3A00460208" target="_blank" >RIV/68081731:_____/16:00460208 - isvavai.cz</a>
Result on the web
<a href="http://www.trends.isibrno.cz/" target="_blank" >http://www.trends.isibrno.cz/</a>
DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
The information depth of backscattered electron imaging
Original language description
Of the conventional imaging signals in the scanning electron microscope (SEM), the secondary electrons generally reflect surface properties of the sample, while the backscattered electrons (BSE) are capable of providing information about complex properties of the target down to a certain subsurface depth. Contrast mechanisms are combined according to the energy of incident electrons and energy and angular acceptance of BSE detection. In all cases, a question arises concerning the information depth of this mode. No applicable answer provides a definition declaring this depth as that from which we still obtain useful information about the object. We can employ software simulating the electron scattering in solids,nwhile experimental approaches are also possible. Moreover, two analytic formulas can be found in the literature.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Result continuities
Project
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Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2016
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of the 15th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation
ISBN
978-80-87441-17-6
ISSN
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e-ISSN
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Number of pages
2
Pages from-to
46-47
Publisher name
Institute of Scientific Instruments CAS
Place of publication
Brno
Event location
Skalský dvůr
Event date
May 29, 2016
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000391254000021