Compact interferometric displacement gauge with sub-nanometer resolution and milimeter range

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F16%3A00482608" target="_blank" >RIV/68081731:_____/16:00482608 - isvavai.cz</a>
Result on the web
<a href="http://ieeexplore.ieee.org/document/7808489/" target="_blank" >http://ieeexplore.ieee.org/document/7808489/</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1109/ICSENS.2016.7808489" target="_blank" >10.1109/ICSENS.2016.7808489</a>

Result language
angličtina
Original language name
Compact interferometric displacement gauge with sub-nanometer resolution and milimeter range
Original language description
We report on the design and prototype realization of the gauge probe sensor for the measurement of displacement based on a laser interferometer. The measurement system incorporates a suitable laser source and interferometric phase processing system. The phase extraction (fringe counting) relies on a single-detector homodyne detection method for phase extraction that uses a harmonic optical frequency modulation of the laser beam and allows for a significantly reduced and thus compact and robust optical arrangement. The experimental verification revealed that the sensor system achieves the sub-nanometer precision and nanometer accuracy in the 10 mm measurement range.
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2016
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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