Determination of elastic parameters of Si3N4thin films by means of anumerical approach and bulge tests

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F19%3A00504377" target="_blank" >RIV/68081731:_____/19:00504377 - isvavai.cz</a>

Alternative codes found

RIV/68081723:_____/19:00504377 RIV/00216305:26620/19:PU135478

Result on the web

<a href="https://www.sciencedirect.com/science/article/pii/S0040609018308484?via%3Dihub" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0040609018308484?via%3Dihub</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.tsf.2018.12.039" target="_blank" >10.1016/j.tsf.2018.12.039</a>

Result language

angličtina

Original language name

Determination of elastic parameters of Si3N4thin films by means of anumerical approach and bulge tests

Original language description

This paper describes and applies a methodology to determine the elastic properties of freestanding thin mem-branes by means of a bulge test and a numerical approach. The numerical procedure is based on the combinationof two standard methods i.e. finite element analysis and classical analytical solutions to calculate elasticproperties of thin films. Bulge tests were conducted on silicon nitride (Si3N4) monolayer of 2 × 2mm(square)and 3.5 × 1.5mm(rectangular) membranes with the aim to determine elastics properties (Young's modulus (E)and Poison's ratio (v)) that define the load-deflection curves of both membranes. With this purpose, an errorfunction was constructed for each membrane which involved finite element solutions, analytical solutions andexperimental measurements. Error functions were found and minimized by mapping a set of elastic parametersfor the two membranes (square and rectangular). A unique solution was determined in the intersection of bothlinear approximations, obtaining 236GPaforEand 0.264 forv. It is well known that in a traditional bulge testanalysis only one of both biaxial modulus can be determined and not a combination ofEandv. Numerical resultsshow that calculated load-deflection curves agree well with the measurements obtained for both square andrectangular membranes experimentally. The proposed methodology is only applicable in thin films with elasticbehavior, however generalization for more complicated geometries is possible.

Czech name

—

Czech description

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Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

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OECD FORD branch

20201 - Electrical and electronic engineering

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2019

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Thin Solid Films

ISSN

0040-6090

e-ISSN

—

Volume of the periodical

672

Issue of the periodical within the volume

FEB

Country of publishing house

CH - SWITZERLAND

Number of pages

9

Pages from-to

66-74

UT code for WoS article

000456726000011

EID of the result in the Scopus database

2-s2.0-85059843428