Design of Cryogenic Sample Holder with Electrical Contacts for UHV SEM/SPM
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F19%3A00509126" target="_blank" >RIV/68081731:_____/19:00509126 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.18462/iir.cryo.2019.0031" target="_blank" >http://dx.doi.org/10.18462/iir.cryo.2019.0031</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.18462/iir.cryo.2019.0031" target="_blank" >10.18462/iir.cryo.2019.0031</a>
Alternative languages
Result language
angličtina
Original language name
Design of Cryogenic Sample Holder with Electrical Contacts for UHV SEM/SPM
Original language description
We present design of a cryogenic sample holder for an ultra-high vacuum scanning electron microscope combined with scanning probe microscope (UHV SEM/SPM). The microscope is suitable for fabrication and characterization of nanostructures in the low temperature range of 20 K - 300 K. This newly designed sample holder is equipped with ten spring-loaded electrical contacts for electrical connection of a removable transport pallet to the sample holder. The transport pallet with a sample is equipped with a low temperature sensor, a heating element and ten solid pins. Two quadruples of contacts are reserved for the sample and the temperature sensor allowing thus a precise four-wire measurement of electrical properties of the sample and its temperature. The remaining pair is reserved for two-wire connection of the heating element. In the low-temperature tests, the limit temperature of 22 K was reached in a test vacuum chamber with a cryogenic helium flow cooling system. The ambient temperature was 300 K. The contact function was successfully verified by measuring the transient electrical resistance within the whole range of the working temperatures. Additionally, a thorough research study of commercially available sample holders indicates that the holders for the intended use are not available on the market.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
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OECD FORD branch
20301 - Mechanical engineering
Result continuities
Project
<a href="/en/project/TE01020233" target="_blank" >TE01020233: Advanced Microscopy and Spectroscopy Platform for Research and Development in Nano and Microtechnologies - AMISPEC</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2019
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
15th Cryogenics 2019 IIR International Conference. Proceedings
ISBN
978-2-36215-025-8
ISSN
0151-1637
e-ISSN
—
Number of pages
9
Pages from-to
369-377
Publisher name
IIR
Place of publication
Paris
Event location
Prague
Event date
Apr 8, 2019
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000472960900050