Comparison of three focus sensors for optical topography measurement of rough surfaces
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F19%3A00511898" target="_blank" >RIV/68081731:_____/19:00511898 - isvavai.cz</a>
Alternative codes found
RIV/61989592:15310/19:73596350
Result on the web
<a href="https://www.osapublishing.org/oe/fulltext.cfm?uri=oe-27-23-33459&id=422804" target="_blank" >https://www.osapublishing.org/oe/fulltext.cfm?uri=oe-27-23-33459&id=422804</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1364/OE.27.033459" target="_blank" >10.1364/OE.27.033459</a>
Alternative languages
Result language
angličtina
Original language name
Comparison of three focus sensors for optical topography measurement of rough surfaces
Original language description
The study compares three variants of focus sensors designed for the optical topography measurement of rough surface specimens with submicron accuracy. We present a theoretical analysis of the focus sensor principles and the experimental measurements with a single point laser probe. A low coherent illumination beam was provided by a monochromatic laser source and a rotating diffuser, which reduced the speckles generated by the rough surface. The reflected beam was modulated by three specific optical elements (axicon, double wedge prism, four spherical lenses) realized by a spatial light modulator. A digital camera detected the output intensity patterns that were evaluated by the intensity centroid method. The results showed a good coincidence of the surface profiles obtained by the three sensor variants with the root-mean-square deviations below one micron. We discuss the results obtained for several specimens with various surface roughness and compare the differences between the three focus sensor variants.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10306 - Optics (including laser optics and quantum optics)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2019
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Optics Express
ISSN
1094-4087
e-ISSN
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Volume of the periodical
27
Issue of the periodical within the volume
23
Country of publishing house
US - UNITED STATES
Number of pages
15
Pages from-to
33459-33473
UT code for WoS article
000495871300053
EID of the result in the Scopus database
2-s2.0-85075269050