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Determination of thickness refinement using STEM detector segments

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F19%3A00524885" target="_blank" >RIV/68081731:_____/19:00524885 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Determination of thickness refinement using STEM detector segments

  • Original language description

    Quantitative STEM imaging together with Monte Carlo simulations of electron scattering in solids can bring interesting results about properties of many thin samples. It is possible to determine thickness of a sample, to calculate mass of particles and measure mass per length/area. Appropriate calibration is one of the crucial parts of the method. Even a small error or inaccuracy in detector response to electron beam either blanked or full brings significant error into thickness determination. This problem can be overcome by parallel STEM imaging in more segments of the detector. Comparing more segments gives a possibility to use a signal from different segments for different thicknesses of a sample. Accuracy of individual parts of the detector depends on the captured signal quantity. It is desirable to use such a STEM detector segment that provides the greatest signal change to a unit of thickness. To demonstrate the usage, we used a sample of Latex nanospheres placed on thin carbon lacey film, diameter of the nanospheres was around 600 nm in order to compare the results from different detector segments. Thanks to the known thickness of the sample (calculated from its geometrical shape), it is possible to estimate the optimal acquisition settings and post processing steps with the known and the true state of the sample.

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

  • OECD FORD branch

    20201 - Electrical and electronic engineering

Result continuities

  • Project

    Result was created during the realization of more than one project. More information in the Projects tab.

  • Continuities

    I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Others

  • Publication year

    2019

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    10th Anniversary International Conference on Nanomaterials - Research and Application (NANOCON 2018)

  • ISBN

    978-80-87294-89-5

  • ISSN

  • e-ISSN

  • Number of pages

    5

  • Pages from-to

    677-681

  • Publisher name

    Tanger

  • Place of publication

    Ostrava

  • Event location

    Brno

  • Event date

    Oct 17, 2018

  • Type of event by nationality

    EUR - Evropská akce

  • UT code for WoS article

    000513131900116