Determination of thickness refinement using STEM detector segments
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F19%3A00524885" target="_blank" >RIV/68081731:_____/19:00524885 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Determination of thickness refinement using STEM detector segments
Original language description
Quantitative STEM imaging together with Monte Carlo simulations of electron scattering in solids can bring interesting results about properties of many thin samples. It is possible to determine thickness of a sample, to calculate mass of particles and measure mass per length/area. Appropriate calibration is one of the crucial parts of the method. Even a small error or inaccuracy in detector response to electron beam either blanked or full brings significant error into thickness determination. This problem can be overcome by parallel STEM imaging in more segments of the detector. Comparing more segments gives a possibility to use a signal from different segments for different thicknesses of a sample. Accuracy of individual parts of the detector depends on the captured signal quantity. It is desirable to use such a STEM detector segment that provides the greatest signal change to a unit of thickness. To demonstrate the usage, we used a sample of Latex nanospheres placed on thin carbon lacey film, diameter of the nanospheres was around 600 nm in order to compare the results from different detector segments. Thanks to the known thickness of the sample (calculated from its geometrical shape), it is possible to estimate the optimal acquisition settings and post processing steps with the known and the true state of the sample.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
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OECD FORD branch
20201 - Electrical and electronic engineering
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2019
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
10th Anniversary International Conference on Nanomaterials - Research and Application (NANOCON 2018)
ISBN
978-80-87294-89-5
ISSN
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e-ISSN
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Number of pages
5
Pages from-to
677-681
Publisher name
Tanger
Place of publication
Ostrava
Event location
Brno
Event date
Oct 17, 2018
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
000513131900116