Nanoscale Estimation of Coating Thickness on Substrates via Standardless BSE Detector Calibration

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F20%3A00525112" target="_blank" >RIV/68081731:_____/20:00525112 - isvavai.cz</a>

Result on the web

<a href="https://www.mdpi.com/2079-4991/10/2/332" target="_blank" >https://www.mdpi.com/2079-4991/10/2/332</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.3390/nano10020332" target="_blank" >10.3390/nano10020332</a>

Result language

angličtina

Original language name

Nanoscale Estimation of Coating Thickness on Substrates via Standardless BSE Detector Calibration

Original language description

The thickness of electron transparent samples can be measured in an electron microscope using several imaging techniques like electron energy loss spectroscopy (EELS) or quantitative scanning transmission electron microscopy (STEM). We extrapolate this method for using a back-scattered electron (BSE) detector in the scanning electron microscope (SEM). This brings the opportunity to measure the thickness not just of the electron transparent samples on TEM mesh grids, but, in addition, also the thickness of thin films on substrates. Nevertheless, the geometry of the microscope and the BSE detector poses a problem with precise calibration of the detector. We present a simple method which can be used for such a type of detector calibration that allows absolute (standardless) measurement of thickness, together with a proof of the method on test samples.

Czech name

—

Czech description

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Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

—

OECD FORD branch

21001 - Nano-materials (production and properties)

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2020

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Nanomaterials

ISSN

2079-4991

e-ISSN

—

Volume of the periodical

10

Issue of the periodical within the volume

2

Country of publishing house

CH - SWITZERLAND

Number of pages

11

Pages from-to

332

UT code for WoS article

000522456300151

EID of the result in the Scopus database

2-s2.0-85079696006