Statistical Coulomb interactions in multi-beam SEM

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F19%3A00524976" target="_blank" >RIV/68081731:_____/19:00524976 - isvavai.cz</a>

Result on the web

<a href="https://www.worldscientific.com/doi/10.1142/S0217751X19420211" target="_blank" >https://www.worldscientific.com/doi/10.1142/S0217751X19420211</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1142/S0217751X19420211" target="_blank" >10.1142/S0217751X19420211</a>

Result language

angličtina

Original language name

Statistical Coulomb interactions in multi-beam SEM

Original language description

Statistical Coulomb interactions in conventional scanning electron microscopy mostly affect the probe size via energy spread and virtual source broadening in the emitter vicinity. However, in a multi-beam probe forming system such as a multi-beam scanning electron microscopes (MBSEM), the trajectory displacement due to interactions in the whole column can give a contribution to the final probe size. For single-beam systems, this can be expressed using approximate formulae for the total trajectory displacement in a beam segment (Jansen's theory) or by integrating contributions of infinitesimally thin beam slices (the slice method). We build on Jansen's theory of statistical Coulomb interactions and develop formulae for the trajectory displacement in a multi-beam system. We also develop a more precise semi-analytical result using the slice method. We compare both approaches with a Monte Carlo simulation and show a good agreement with the results of the slice method. Finally, we discuss the implications of our results for the optical design of multi-beam SEM. In a multi-beam with probe size dominated by Coulomb interactions, an increase in the number of beamlets does not necessarily provide an increase of throughput, because the probe size is limited by the total current. Furthermore, we disprove the notion of the fewer the crossovers the less the Coulomb interactions by showing the quadratic dependence of trajectory displacement on segment length.

Czech name

—

Czech description

—

Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

—

OECD FORD branch

10306 - Optics (including laser optics and quantum optics)

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2019

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

International Journal of Modern Physics. A

ISSN

0217-751X

e-ISSN

—

Volume of the periodical

34

Issue of the periodical within the volume

36

Country of publishing house

SG - SINGAPORE

Number of pages

11

Pages from-to

1942021

UT code for WoS article

000516718800022

EID of the result in the Scopus database

2-s2.0-85076546405