Trajectory displacement in a multi beam scanning electron microscope
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F21%3A00549399" target="_blank" >RIV/68081731:_____/21:00549399 - isvavai.cz</a>
Result on the web
<a href="https://www.sciencedirect.com/science/article/pii/S030439912100019X" target="_blank" >https://www.sciencedirect.com/science/article/pii/S030439912100019X</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.ultramic.2021.113223" target="_blank" >10.1016/j.ultramic.2021.113223</a>
Alternative languages
Result language
angličtina
Original language name
Trajectory displacement in a multi beam scanning electron microscope
Original language description
The analytical theory of statistical Coulomb interactions allows to determine the trajectory displacement in a single rotationally symmetrical beam with well-behaved spatial and angular particle distributions. This can be used to estimate the trajectory displacement in a multi-beam system using the so called fully-filled segment approximation. This approach predicts full compensation of trajectory displacement for a specific setup of the system. We show that this prediction is not consistent with Monte Carlo simulations and we develop a new approach to the calculation, showing that two independent trajectory displacement contributions are present in a multi-beam system. We support this calculation with Monte Carlo simulations as well as with experimental data from a multi-beam system.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10306 - Optics (including laser optics and quantum optics)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2021
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Ultramicroscopy
ISSN
0304-3991
e-ISSN
1879-2723
Volume of the periodical
223
Issue of the periodical within the volume
April
Country of publishing house
NL - THE KINGDOM OF THE NETHERLANDS
Number of pages
8
Pages from-to
113223
UT code for WoS article
000632279200007
EID of the result in the Scopus database
2-s2.0-85100426261