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Trajectory displacement in a multi beam scanning electron microscope

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F21%3A00549399" target="_blank" >RIV/68081731:_____/21:00549399 - isvavai.cz</a>

  • Result on the web

    <a href="https://www.sciencedirect.com/science/article/pii/S030439912100019X" target="_blank" >https://www.sciencedirect.com/science/article/pii/S030439912100019X</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1016/j.ultramic.2021.113223" target="_blank" >10.1016/j.ultramic.2021.113223</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Trajectory displacement in a multi beam scanning electron microscope

  • Original language description

    The analytical theory of statistical Coulomb interactions allows to determine the trajectory displacement in a single rotationally symmetrical beam with well-behaved spatial and angular particle distributions. This can be used to estimate the trajectory displacement in a multi-beam system using the so called fully-filled segment approximation. This approach predicts full compensation of trajectory displacement for a specific setup of the system. We show that this prediction is not consistent with Monte Carlo simulations and we develop a new approach to the calculation, showing that two independent trajectory displacement contributions are present in a multi-beam system. We support this calculation with Monte Carlo simulations as well as with experimental data from a multi-beam system.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database

  • CEP classification

  • OECD FORD branch

    10306 - Optics (including laser optics and quantum optics)

Result continuities

  • Project

    Result was created during the realization of more than one project. More information in the Projects tab.

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Others

  • Publication year

    2021

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Ultramicroscopy

  • ISSN

    0304-3991

  • e-ISSN

    1879-2723

  • Volume of the periodical

    223

  • Issue of the periodical within the volume

    April

  • Country of publishing house

    NL - THE KINGDOM OF THE NETHERLANDS

  • Number of pages

    8

  • Pages from-to

    113223

  • UT code for WoS article

    000632279200007

  • EID of the result in the Scopus database

    2-s2.0-85100426261