Patterning of conductive nano-layers on garnet

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F21%3A00543745" target="_blank" >RIV/68081731:_____/21:00543745 - isvavai.cz</a>

Result on the web

<a href="https://www.confer.cz/nanocon/2020/3731-patterning-of-conductive-nano-layer-on-garnet" target="_blank" >https://www.confer.cz/nanocon/2020/3731-patterning-of-conductive-nano-layer-on-garnet</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.37904/nanocon.2020.3731" target="_blank" >10.37904/nanocon.2020.3731</a>

Result language

angličtina

Original language name

Patterning of conductive nano-layers on garnet

Original language description

Synthetic crystalline materials of the garnet group are used as scintillators in scanning electron microscopy. If a thick conductive layer is applied on the garnet surface, slower electrons don't have enough energy to pass through this relatively thick conductive layer on the scintillator surface. Therefore, either thinner conductive layer or appropriate patterning of the thicker layer has to be used. Within this contribution we study the patterning process of such conductive nano-layer. Resolution of the patterning process is of high interest. Two approaches are compared: direct writing electron beam lithography and mask projection UV lithography.

Czech name

—

Czech description

—

Type

D - Article in proceedings

CEP classification

—

OECD FORD branch

21002 - Nano-processes (applications on nano-scale); (biomaterials to be 2.9)

Project

<a href="/en/project/TN01000008" target="_blank" >TN01000008: Center of electron and photonic optics</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2021

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

NANOCON 2020. 12th International Conference on Nanomaterials - Research & Application. Conference proceedings

ISBN

978-80-87294-98-7

ISSN

2694-930X

e-ISSN

—

Number of pages

4

Pages from-to

(2021)

Publisher name

TANGER

Place of publication

Ostrava

Event location

Brno

Event date

Oct 21, 2020

Type of event by nationality

WRD - Celosvětová akce

UT code for WoS article

000664505500037