Study of RF discharge properties for hybrid pulsed laser deposition.

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F01%3A02010321" target="_blank" >RIV/68378271:_____/01:02010321 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Study of RF discharge properties for hybrid pulsed laser deposition.

Original language description

We have created CN x layers by pulsed laser deposition (PLD) using graphite target in N 2 ambient and KrF excimer laser. We have found that active nitrogen plays an important role in this task. We have studied the influence of various RF parameters on the activation of nitrogen by optical emission spectroscopy.

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2001

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

Proceedings of Workshop 2001.

ISBN

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ISSN

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e-ISSN

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Number of pages

2

Pages from-to

114-115

Publisher name

Czech Technical University

Place of publication

Praha

Event location

Praha [CZ]

Event date

Feb 1, 2001

Type of event by nationality

CST - Celostátní akce

UT code for WoS article

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