Energy-resolved mass spectroscopy of Ar-C 2 H 2 -N 2 plasma, performed during ion plating of TiC and Ti N hard coatings.

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F03%3A02030257" target="_blank" >RIV/68378271:_____/03:02030257 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Energy-resolved mass spectroscopy of Ar-C 2 H 2 -N 2 plasma, performed during ion plating of TiC and Ti N hard coatings.

Original language description

Energy resolved mass spectroscopy studies during the discharge in Ar+N 2 +C 2 H 2 gas mixture in a triode ion plating apparatus Balzers BAI 730 reveals a high degree of acetylene decomposition under typical condition suitable for Cr and Ti evaporation. The most abundant neutral species beside Ar in the case of Ar+C 2 H 2 gas mixture is hydrogen and acetylene as could be expected.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

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Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2003

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Surface and Coating Technology

ISSN

0257-8972

e-ISSN

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Volume of the periodical

174-175

Issue of the periodical within the volume

N/A

Country of publishing house

NL - THE KINGDOM OF THE NETHERLANDS

Number of pages

4

Pages from-to

943-946

UT code for WoS article

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EID of the result in the Scopus database

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