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Tin oxide thin films prepared by laser-assisted metal-organic CVD: Structural and gas sensing properties

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F05%3A00025249" target="_blank" >RIV/68378271:_____/05:00025249 - isvavai.cz</a>

  • Alternative codes found

    RIV/68407700:21460/05:00168573

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Tin oxide thin films prepared by laser-assisted metal-organic CVD: Structural and gas sensing properties

  • Original language description

    Amorphous and polycrystalline tin oxide (SnOx) thin films were grown by ArF excimer laser-induced metal-organic chemical vapour deposition (L-MOCVD) from tetramethyltin (TMT) and oxygen as precursors. The films structure and composition were investigatedby x-ray diffraction (XRD) and x-ray photoelectron spectroscopy (XPS)

  • Czech name

    Tenké vrstvy oxidů cínu připravené pomocí laser-asistované metal organické CVD: strukturní a senzorické vlastnosti pro plyny

  • Czech description

    Amorfní a polykrystalické vrstvy oxidů cínu byly připraveny ArF laserem indukovanou MOCVD z tetramethylcínu a kyslíku jako prekurzorů. Vrystvy oxidů cínu byly dále použity jako citlivé vrystvy pro detekci plynů. Uspokojivé sensorové vlastnosti byly dosaženy pro oxidaci NO2 a redukci N2O, CH4, SO2, CO, CO2, H2

Classification

  • Type

    J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

  • CEP classification

    BL - Plasma physics and discharge through gases

  • OECD FORD branch

Result continuities

  • Project

    Result was created during the realization of more than one project. More information in the Projects tab.

  • Continuities

    Z - Vyzkumny zamer (s odkazem do CEZ)

Others

  • Publication year

    2005

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Surface and Coatings Technology

  • ISSN

    0257-8972

  • e-ISSN

  • Volume of the periodical

    200

  • Issue of the periodical within the volume

    -

  • Country of publishing house

    CH - SWITZERLAND

  • Number of pages

    4

  • Pages from-to

    1057-1060

  • UT code for WoS article

  • EID of the result in the Scopus database