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Roughness measurement of silicon ingot surfaces after squaring with SQM 2800.0 THEMIS machine

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F06%3A00079494" target="_blank" >RIV/68378271:_____/06:00079494 - isvavai.cz</a>

  • Alternative codes found

    RIV/61989592:15310/06:00003274

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Roughness measurement of silicon ingot surfaces after squaring with SQM 2800.0 THEMIS machine

  • Original language description

    Surface topography has great importance in specifying quality of a surface. A significant proportion of component failure starts at the surface due to either an isolated manufacturing discontinuity or gradual deterioration of the surface quality. The most important parameter describing surface integrity is surface roughness. In the manufacturing industry, surface must be within certain limits of roughness.

  • Czech name

    Měření drsnosti povrchu křemíkových ingotů po squarování

  • Czech description

    Topografie povrchu má velký vliv na specifikaci jeho kvality. Jedna z podstatných vlastností popisujících povrch je drsnost povrchu. Kontrola parametrů drsnosti po squarování Si ingotů je hlavním předmětem příspěvku.

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    BH - Optics, masers and lasers

  • OECD FORD branch

Result continuities

  • Project

    <a href="/en/project/1M06002" target="_blank" >1M06002: Optical structures, detection systems and relevant technologies for low photon number applications</a><br>

  • Continuities

    Z - Vyzkumny zamer (s odkazem do CEZ)

Others

  • Publication year

    2006

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    SILICON 2006

  • ISBN

    80-239-7781-4

  • ISSN

  • e-ISSN

  • Number of pages

    6

  • Pages from-to

    202-207

  • Publisher name

    TECON Scientific

  • Place of publication

    Rožnov pod Radhoštěm

  • Event location

    Rožnov pod Radhoštěm

  • Event date

    Nov 7, 2006

  • Type of event by nationality

    EUR - Evropská akce

  • UT code for WoS article