Novel high frequency pulsed MW-linear antenna plasma-chemistry: Routes towards large area, low pressure nanodiamond growth

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F11%3A00361471" target="_blank" >RIV/68378271:_____/11:00361471 - isvavai.cz</a>

Alternative codes found

RIV/68407700:21460/11:00183546

Result on the web

<a href="http://dx.doi.org/10.1016/j.diamond.2011.01.003" target="_blank" >http://dx.doi.org/10.1016/j.diamond.2011.01.003</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.diamond.2011.01.003" target="_blank" >10.1016/j.diamond.2011.01.003</a>

Result language

angličtina

Original language name

Novel high frequency pulsed MW-linear antenna plasma-chemistry: Routes towards large area, low pressure nanodiamond growth

Original language description

Current experimental microwave plasma enhanced chemical vapour deposition (MW PECVD) concepts for diamond thin films do not allow scaling up toward large areas, which is essential for microelectronic industries. Also, current growth temperatures are rather high and not compatible with processing technologies. In the current work we demonstrate a breakthrough concept using a high frequency (HF) pulsed MW-linear antenna plasma configuration, allowing a scalable concept. By using HF pulses non-linear MW absorption conditions are reached, allowing a reduction of input power to 4 W/cm2 compared with typically 100-200 W/cm2 for resonance cavity applicators. Despite the factor of 50 power reduction, the growth rate obtained at 450°C is comparable to or higherthan that of resonance cavity systems. Our concept is a significant improvement as compared to [1 & 3] previous methods of nanodiamond growth. The resulting diamond films show columnar growth, i.e. resembling classical NCD.

Czech name

—

Czech description

—

Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

—

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2011

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Diamond and Related Materials

ISSN

0925-9635

e-ISSN

—

Volume of the periodical

20

Issue of the periodical within the volume

4

Country of publishing house

CH - SWITZERLAND

Number of pages

3

Pages from-to

613-615

UT code for WoS article

000291140200032

EID of the result in the Scopus database

—