Design and fabrication of piezoresistive strain gauges based on nanocrystalline diamond layers
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F12%3A00385048" target="_blank" >RIV/68378271:_____/12:00385048 - isvavai.cz</a>
Alternative codes found
RIV/68407700:21230/12:00181679 RIV/68407700:21340/12:00200430
Result on the web
<a href="http://dx.doi.org/10.1016/j.vacuum.2011.07.022" target="_blank" >http://dx.doi.org/10.1016/j.vacuum.2011.07.022</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.vacuum.2011.07.022" target="_blank" >10.1016/j.vacuum.2011.07.022</a>
Alternative languages
Result language
angličtina
Original language name
Design and fabrication of piezoresistive strain gauges based on nanocrystalline diamond layers
Original language description
The paper reports on design, fabrication and characterization of piezoresistive sensors based on boron doped nanocrystalline diamond (NCD) layers. The piezoresistive sensing boron doped diamond thin films were realized on SiO2/Si3N4/Si substrates by microwave plasma enhanced chemical vapor deposition (CVD) and the piezoresistive structures were formed by reactive ion etching. The highest gauge factor at higher temperatures (GF = 7.2 at 250 °C) was observed for moderate doping level (boron to carbon ratio of 3000 ppm). One of the aims was the extraction of piezoresistive coefficients of fabricated diamond layers for utilization in a finite element piezoresistive solver.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Vacuum
ISSN
0042-207X
e-ISSN
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Volume of the periodical
86
Issue of the periodical within the volume
6
Country of publishing house
GB - UNITED KINGDOM
Number of pages
4
Pages from-to
689-692
UT code for WoS article
000301018400025
EID of the result in the Scopus database
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