?c-Si solar cells by direct deposition with APCVD
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F12%3A00386627" target="_blank" >RIV/68378271:_____/12:00386627 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.4229/27thEUPVSEC2012-3CV.2.7" target="_blank" >http://dx.doi.org/10.4229/27thEUPVSEC2012-3CV.2.7</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.4229/27thEUPVSEC2012-3CV.2.7" target="_blank" >10.4229/27thEUPVSEC2012-3CV.2.7</a>
Alternative languages
Result language
angličtina
Original language name
?c-Si solar cells by direct deposition with APCVD
Original language description
The rapid thermal direct deposition of micro-crystalline silicon (?c-Si) layers by atmospheric pressure chemical vapour deposition (APCVD) can be done on different intermediate layers. The deposition is done at temperatures between 850 °C and 1150 °C. Adeposition rate of 1.6 ?m/min has been achieved using standard process conditions. The microcrystalline structure changes depending on the deposition temperature and the layer thickness. Electron backscatter diffraction measurements show grain sizes of 0.5-10.0 ?m with a columnar structure. Based on these process parameters and material properties the ?c-Si layers have been simulated and optimised for two different solar cell concepts featuring different metallisation schemes and a comparison between epitaxial ?c-Si emitter, diffused POCl3 emitter, and plasma enhanced chemical vapour deposition (PECVD) deposited a-Si heterojunction solar cells.
Czech name
—
Czech description
—
Classification
Type
D - Article in proceedings
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
—
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of the 27th European Photovoltaic Solar Energy Conference and Exhibition
ISBN
3-936338-28-0
ISSN
—
e-ISSN
—
Number of pages
7
Pages from-to
2386-2392
Publisher name
WIP Wirtschaft und Infrastruktur GmbH & Co Planungs KG
Place of publication
München
Event location
Frankfurt
Event date
Sep 24, 2012
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
—