Linear antenna microwave plasma CVD diamond deposition at the edge of no-growth region of C-H-O ternary diagram
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F12%3A00389192" target="_blank" >RIV/68378271:_____/12:00389192 - isvavai.cz</a>
Alternative codes found
RIV/68407700:21340/12:00200654
Result on the web
<a href="http://dx.doi.org/10.1002/pssb.201200124" target="_blank" >http://dx.doi.org/10.1002/pssb.201200124</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1002/pssb.201200124" target="_blank" >10.1002/pssb.201200124</a>
Alternative languages
Result language
angličtina
Original language name
Linear antenna microwave plasma CVD diamond deposition at the edge of no-growth region of C-H-O ternary diagram
Original language description
The process parametric window for diamond deposition using the chemical vapor deposition at low pressures is quite limited where addition of oxygen in the gas phase broadens this window. The lower boundary of the lens-shaped domain in C-H-O ternary diagram concurs with the H2-CO tie-line (C/(C+O)=0.5). In this work, we present the set of experiments where the ratio of C/(C+O) was kept at a constant value 0.385. The effect of hydrogen concentration (ratio O/(O+H) varied from 0.047 to 0.364) on plasma characteristics and deposited NCD films were investigated. Raman spectroscopy confirmed the diamond character of all deposited coatings while scanning electron microscopy showed transformation from not closed to continuous film and further decrease of grainsize and finally growth of diamond nanowires while decreasing hydrogen concentration in a gas mixture.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Physica Status Solidi B-Basic Solid State Physics
ISSN
0370-1972
e-ISSN
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Volume of the periodical
249
Issue of the periodical within the volume
12
Country of publishing house
DE - GERMANY
Number of pages
4
Pages from-to
2612-2615
UT code for WoS article
000312215300074
EID of the result in the Scopus database
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