Optimization of various technological processes in the fabrication of silicon based layers in SVCS process innovation high-temperature horizontal furnace SV-FUR reactors using multiphysics CFD-ace+ software

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F13%3A00424296" target="_blank" >RIV/68378271:_____/13:00424296 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Optimization of various technological processes in the fabrication of silicon based layers in SVCS process innovation high-temperature horizontal furnace SV-FUR reactors using multiphysics CFD-ace+ software

Original language description

A fabrication cycle of silicon based layers in semiconductor and PV industry includes several high-temperature processes. While the atmospheric-pressure thermal oxidation and diffusion are used for the SiO2 deposition and phosphorus or boron doping, respectively, the low-pressure CVD or plasma-enhanced CVD processes are used for the preparation of passivation and anti-reflecting coatings. One of the most important requirements in the production is a good homogeneity of the surface film created by the particular reaction process both across the Si wafer and within the whole load. In this contribution will be shown that the multiphysics modelling using the dedicated software package is very helpful in the optimization of process parameters leading not only to better homogeneity, but also to bet terutilization of the process gases, shortening the process time and other benefits, finally leading to an improvement of the manufacturing profitability and competitiveness of the product.

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

<a href="/en/project/TA01020972" target="_blank" >TA01020972: Modification of the particular technology facilities of the batch processes for the yield enhancement of the highly efficient silicon solar cells using the numerical and physical pre- and post-processing models CFD-ACE+ and Flow Simulation.</a><br>

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2013

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

Perspektívne vákuové metódy a technológie (Perspective vacuum methods and technologies)

ISBN

978-80-971179-2-4

ISSN

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e-ISSN

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Number of pages

7

Pages from-to

25-31

Publisher name

Slovenská vákuová spoločnosť

Place of publication

Bratislava

Event location

Štrbské Pleso

Event date

Oct 10, 2013

Type of event by nationality

EUR - Evropská akce

UT code for WoS article

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