Hypersonic band gap in an AlN-TiN bilayer phononic crystal slab
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F14%3A00427123" target="_blank" >RIV/68378271:_____/14:00427123 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1063/1.4864310" target="_blank" >http://dx.doi.org/10.1063/1.4864310</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1063/1.4864310" target="_blank" >10.1063/1.4864310</a>
Alternative languages
Result language
angličtina
Original language name
Hypersonic band gap in an AlN-TiN bilayer phononic crystal slab
Original language description
We show both theoretically and experimentally the existence of a complete band gap in a phononic crystal (PnC) constituted by periodical air holes drilled in a solid bi-layer slab. The composite slab is formed with an aluminum nitride (AlN) layer deposited on a titanium nitride (TiN) thin metallic film. Indeed, AlN slabs are of great interest in many technological applications, in particular, owing to the capabilities of AlN as a complementary metal-oxide-semiconductor compatible material for integration in piezoelectric radio frequency filters (thin-film bulk acoustic resonator technology). The TiN layer was chosen as a buffer to enable small lattice mismatch with AlN, thus resulting in highly c-axis oriented and low stresses at the interface.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
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Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Applied Physics Letters
ISSN
0003-6951
e-ISSN
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Volume of the periodical
104
Issue of the periodical within the volume
6
Country of publishing house
US - UNITED STATES
Number of pages
5
Pages from-to
"063101-1"-"063101-5"
UT code for WoS article
000331803800067
EID of the result in the Scopus database
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